Hi all,
I have a problem with my Agilent 6410 LC-MS. It fails to complete the pump down process. The foreline pressure and the foreline pump seems to be ok but turbo pump does not speed up more than 1 %.

I've checked the system for leak, there is no leak. Foreline pressure is about 2 Torr. I changed ion gauge with the new one, but it seems to work well.

I can't locate where the problem is. Is it possible the failure in electronic boards or something else?

Thanks.