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- Posts: 4
- Joined: Sat Jan 20, 2024 8:20 am
We're a small company who bought a decommissioned 6890/5973N from auction a few months ago. After scouring manuals, buying consumables, and a lot of reading we were able to get the instrument up and running a few weeks ago with beautiful clean results!
Until today.
Went to fire it up and pump down and noticed some big unusual jumps on the foreline pressure in the first few minutes, but it stabilized at a healthy 50 mTorr and we let it sit for a few hours before attempting a tune. As soon as we started a tune I got a message saying Log Amp Mismatch and it stopped tuning.
Now every time I attempt to start the MSD it thinks it has a turbo pump (it doesn't) and shows turbo pump speed (0%) instead of foreline pressure.
All heaters work just fine and can be controlled remotely or on the panel, and the rough pump runs just fine. The rest of the panel interface works like normal.
We've checked every fuse, including the ones that require removing the board enclosure. All wires and connectors were removed and reseated with no luck.
I see no evidence of the diffusion pump kicking on (no red LED)
Any ideas? Could a corrupted firmware possibly cause something like this?
(Update: Flashing firmware didn't fix it)
Thanks for reading!
