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- Posts: 176
- Joined: Mon Mar 14, 2005 7:01 pm
Hi!
I rebuild all my pump, Varian, Pfeiffer and Edwards but each time i'm rebuilt Edwards pump, i have a problem.
I have rebuild a Edwards pump 1.5, new shaft seal, new blade ect..
after that, all is okay, no trace of oil and the pump work well but when i test for vacuum, my vacuum is not okay...the vacuum value is 400 mtorr. Normally, i have 100mtorr or less.
When i open the gas ballast, the vacuum is lost.
What do you think about this problem?
Is the problem are the shaft seal?
Thank you for your help?
I rebuild all my pump, Varian, Pfeiffer and Edwards but each time i'm rebuilt Edwards pump, i have a problem.
I have rebuild a Edwards pump 1.5, new shaft seal, new blade ect..
after that, all is okay, no trace of oil and the pump work well but when i test for vacuum, my vacuum is not okay...the vacuum value is 400 mtorr. Normally, i have 100mtorr or less.
When i open the gas ballast, the vacuum is lost.
What do you think about this problem?
Is the problem are the shaft seal?
Thank you for your help?
