So I’m at a bit of a loss when it comes to GC/MS interpretation at my company. We work with mostly Silica and Germane gas mixes but I can’t find much literature on this, apart from the minor mentions in my organic reference books. My understanding is that these compounds are pretty consistent in their fragmentation patterns, but it would be nice to know what an ideal silane MS should look like for troubleshooting.

Does anyone have a book and/or website that is good with mass spec interpretation for inorganic material?