by
LALman » Mon Oct 12, 2020 11:10 pm
Reading this source cleaning method
https://www.agilent.com/cs/library/technicaloverviews/Public/5989-5974EN.pdf It says that heating the source with high background water will reactivate the source all over again.
I pumped to <30mTorr then turned on diff pump and then after high vacuum was
good I turned on source heating and left for the day. But when I checked water and air the next day...
Day 1: 4.3% Nitrogen, 1.2% Oxygen and 50% water vapor. 69 = 628544
Day 2: 2.1% Nitrogen, 0.7% Oxygen and 36% water vapor. 69 = 1043840
Day 3: 1.4% Nitrogen, 0.5% Oxygen and 20% water vapor. 69 = 724928
Today is day 3, so I am guessing maybe that water vapor ruined my cleaning job and I should re-clean the source get it under vacuum and not heat the source until water signal is low as per this pdf? Could take several days but at least I would not be undoing my lens cleaning job.